11.   The plant makes extremely thin semiconductor wafers.

12.   When experiments were halted Tuesday, three semiconductor wafers had been produced.

13.   Before it was shut down Tuesday, three semiconductor wafers had been produced, NASA said.

14.   Before overheating problems forced the shutdown of the facility Tuesday, the experiments had produced three semiconductor wafers.

15.   The proposal allowing investment of low-end semiconductor wafers would be sent to the cabinet on Tuesday for review, Chen said.

16.   Taiwan has tentatively decided to allow China-bound investment in semiconductor wafers, officials said Saturday.

17.   Taiwan may allow local businesses to invest for the first time in eight-inch semiconductor wafer plants in China, a technology industry leader said Thursday.